Field Emission Scanning Electron Microscope (FESEM)

Overview

The FESEM (JEOL JSM 7610F) facility created under 12th Five Year Plan CSIR project (NanoSHE & IntelCOAT) provides services for researchers at CSIR, Institutes and Industry across the country. The facility is located in GCL building, Ground Floor. The equipment carries the following specifications

• In-lens thermal Field Emission Gun (FEG)
• High resolution by the semi-inlens objective lens: nm @ 30 kV, 1.3 nm @ 1 kV (Gentle Beam Mode)
• Magnification: 25 – 1,000,000
• Maximum probe current of 200nA
• Operating Voltage: 100V to 30kV